JPH0477228U - - Google Patents
Info
- Publication number
- JPH0477228U JPH0477228U JP12053490U JP12053490U JPH0477228U JP H0477228 U JPH0477228 U JP H0477228U JP 12053490 U JP12053490 U JP 12053490U JP 12053490 U JP12053490 U JP 12053490U JP H0477228 U JPH0477228 U JP H0477228U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- inlet
- tube
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12053490U JPH0477228U (en]) | 1990-11-16 | 1990-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12053490U JPH0477228U (en]) | 1990-11-16 | 1990-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0477228U true JPH0477228U (en]) | 1992-07-06 |
Family
ID=31868436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12053490U Pending JPH0477228U (en]) | 1990-11-16 | 1990-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0477228U (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01241819A (ja) * | 1988-03-23 | 1989-09-26 | Dainippon Screen Mfg Co Ltd | 基板の熱処理装置 |
| JPH02174224A (ja) * | 1988-12-27 | 1990-07-05 | Tel Sagami Ltd | 熱処理装置 |
| JPH02218119A (ja) * | 1989-02-20 | 1990-08-30 | Toshiba Corp | 縦形半導体拡散炉 |
-
1990
- 1990-11-16 JP JP12053490U patent/JPH0477228U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01241819A (ja) * | 1988-03-23 | 1989-09-26 | Dainippon Screen Mfg Co Ltd | 基板の熱処理装置 |
| JPH02174224A (ja) * | 1988-12-27 | 1990-07-05 | Tel Sagami Ltd | 熱処理装置 |
| JPH02218119A (ja) * | 1989-02-20 | 1990-08-30 | Toshiba Corp | 縦形半導体拡散炉 |